Synthesis of Zirconia and Hafnia Nanotubes by Atomic Layer Deposition (ALD) Template Method

被引：5

作者：

Abdel-Fattah, Tarek M. ^{[1
,3
,4
]}

Gu, Diefeng ^{[2
,3
,4
]}

Baumgart, Helmut ^{[2
,3
,4
]}

Namkoong, Gon ^{[2
,3
,4
]}

机构：

[1] Christopher Newport Univ, Dept Biol Chem & Environm Sci, Newport News, VA 23606 USA

[2] Old Dominion Univ, Dept Elect Engn, Norfolk, VA 23529 USA

[3] CNU, Appl Res Ctr, Newport News, VA 23606 USA

[4] ODU Jefferson Lab, Newport News, VA 23606 USA

来源：

ATOMIC LAYER DEPOSITION APPLICATIONS 4 | 2008年 / 16卷 / 04期

关键词：

D O I：

10.1149/1.2979990

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Highly ordered zirconia and hafnia nanotubes are prepared by Atomic Layer Deposition (ALD) within the pores of an anodic alumina oxide (AAO) template. Scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) are used to characterize the morphology and elemental compositions of the different and EDS mapping of the entire sample cross-section. The diameters of the AAO channels are in the range of 200 nm and thickness of 60 mu m. The length and diameter of the hafnia and zirconia nanotubes are dependent upon the pore diameter, the thickness of the applied AAO template and the ALD deposition time. The results indicate that the tubes are very uniformly assembled and parallel to each other in the pores of the AAO template.

引用

页码：159 / +

页数：2

共 15 条

[1] Pyrolytic synthesis of carbon nanotubes from sucrose on a mesoporous silicate [J].