A laser-cooled atom beam for nanolithography applications

被引：18

作者：

Camposeo, A ^{[1
]}

Cervelli, F ^{[1
]}

Piombini, A ^{[1
]}

Tantussi, F ^{[1
]}

Fuso, F ^{[1
]}

Allegrini, M ^{[1
]}

Arimondo, E ^{[1
]}

机构：

[1] Univ Pisa, Dipartimento Fis Enrico Fermi, INFM, I-56127 Pisa, Italy

来源：

MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS | 2003年 / 23卷 / 1-2期

关键词：

atom lithography; nanofabrication; laser-cooling; laser manipulation;

D O I：

10.1016/S0928-4931(02)00270-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We are developing an apparatus for atom lithography with the main objective of to push the space resolution of the technique towards its ultimate limit, expected in the 10 nm range. We exploit an original implementation of laser-cooling techniques to produce a brilliant and collimated cesium beam with low longitudinal velocity. Beam characterization, carried out with a variety of spectroscopic techniques, demonstrates the compatibility of the system with the strict requirements of nanolithography experiments. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：217 / 220

页数：4

共 6 条

[1] A pyramidal magneto-optical trap as a source of slow atoms [J].

Arlt, JJ ;

Maragò, O ;

Webster, S ;

Hopkins, S ;

Foot, CJ .

OPTICS COMMUNICATIONS, 1998, 157 (1-6) :303-309

[2] A cold cesium atomic beam produced out of a pyramidal funnel [J].

Camposeo, A ;

Piombini, A ;

Cervelli, F ;

Tantussi, F ;

Fuso, F ;

Arimondo, E .

OPTICS COMMUNICATIONS, 2001, 200 (1-6) :231-239

[3] Special issue: Nanomanipulation of atoms [J].

Meschede, D ;

Mlynek, J .

APPLIED PHYSICS B-LASERS AND OPTICS, 2000, 70 (05) :649-649

[4]

Metcalf H., 1999, LASER COOLING TRAPPI

[5] Atom lithography with a holographic light mask -: art. no. 083601 [J].

Mützel, M ;

Tandler, S ;

Haubrich, D ;

Meschede, D ;

Peithmann, K ;

Flaspöhler, M ;

Buse, K .

PHYSICAL REVIEW LETTERS, 2002, 88 (08) :4

[6] High-contrast, high-resolution focusing of neutral atoms using light forces [J].

Natarajan, V ;

Behringer, RE ;

Timp, G .

PHYSICAL REVIEW A, 1996, 53 (06) :4381-4385

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