Measurement of electron temperature and density in an argon microdischarge by laser Thomson scattering

被引：73

作者：

Belostotskiy, Sergey G. ^{[1
]}

Khandelwal, Rahul ^{[1
]}

Wang, Qiang ^{[1
]}

Donnelly, Vincent M. ^{[1
]}

Economou, Demetre J. ^{[1
]}

Sadeghi, Nader ^{[2
]}

机构：

[1] Univ Houston, Plasma Proc Lab, Dept Chem & Biomol Engn, Houston, TX 77204 USA

[2] Univ Grenoble 1, Spectrometrie Phys Lab, UMR C5588, F-38402 St Martin Dheres, France

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 22期

关键词：

D O I：

10.1063/1.2939437

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Laser Thomson scattering in a novel, backscattered configuration was employed to measure the electron temperature (T(e)) and electron density (n(e)) in argon dc microdischarges, with an interelectrode gap of 600 mu m. Measurements were performed at the center of the gap that corresponds to the positive column. For 50 mA microdischarge current and over the pressure range of 300-700 Torr, the plasma parameters were found to be T(e)=0.9 +/- 0.3 eV and n(e)=(6 +/- 3)x10(13) cm(-3), in reasonable agreement with the predictions of a mathematical model. (C) 2008 American Institute of Physics.

引用

页数：3

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