Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis

被引：9

作者：

Elliman, RG ^{[1
]}

Timmers, H

Palmer, GR

Ophel, TR

机构：

[1] Australian Natl Univ, Inst Adv Studies, Res Sch Phys Sci & Engn, Canberra, ACT 0200, Australia

[2] Univ Newcastle, Dept Phys, Newcastle, NSW 2308, Australia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1998年 / 136卷

关键词：

ion beam analysis; elastic recoil detection analysis; depth resolution;

D O I：

10.1016/S0168-583X(97)00879-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The depth resolution of heavy-ion elastic recoil detection analysis (HIERDA) was examined for Al and Co thin films ranging in thickness from 100 to 400 nm. Measurements were performed with 154 MeV Au ions as the incident beam, and recoils were detected using a gas ionisation detector. Energy spectra were extracted for the Al and Co recoils and the depth resolution determined as a function of film thickness from the width of the high- and low-energy edges. These results were compared with theoretical estimates calculated using the computer program DEPTH. (C) 1998 Elsevier Science B.V.

引用

页码：649 / 653

页数：5

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