High-selectivity single-chip spectrometer for operation at visible wavelengths

被引：9

作者：

Correia, JH ^{[1
]}

Bartek, M ^{[1
]}

Wolffenbuttel, RF ^{[1
]}

机构：

[1] Delft Univ Technol, ITS Elect Engn, Lab Elect Instrumentat, DIMES, NL-2628 CD Delft, Netherlands

来源：

INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST | 1998年

关键词：

D O I：

10.1109/IEDM.1998.746399

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micro-spectrometer has been realized based on an array of Fabry-Perot thin-film optical resonators. The 16 channel micro-spectrometer is IC fabrication compatible and operates in the visible spectral range with an inter-channel shift of 6 nm. Each of the channels is sensitive in a single peak with FWHM of 16 nm. A FWHM < 2 nm and finesse of 40 for narrowband operation is demonstrated.

引用

页码：467 / 470

页数：4

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