Intermediate temperature grown GaAs/AlGaAs photodetector with low dark current and high sensitivity

被引:6
作者
Culp, J [1 ]
Nabet, B [1 ]
Castro, F [1 ]
Anwar, A [1 ]
机构
[1] Drexel Univ, ECE Dept, Philadelphia, PA 19104 USA
关键词
D O I
10.1063/1.122219
中图分类号
O59 [应用物理学];
学科分类号
摘要
A photodetector in which Schottky metal laterally contacts the molecular beam epitaxy grown heterointerface of intermediate-temperature GaAs and Al0.24Ga0.76As is reported. The device processed on 400 degrees C shows very low dark current, less than 25 fA/mu m(2) (0.5 pA/mu m), with a high de responsivity of about 10 A/W at low optical power levels. The device is process compatible with high electron mobility transistor technology. (C) 1998 American Institute of Physics.
引用
收藏
页码:1562 / 1564
页数:3
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