Modification of the surface structure of solid materials by laser radiation involves a complex chain of processes. The first step is the deposition of a certain amount of optical energy in the material. The character of the material excitation is strongly dependent on the laser pulse duration. With the use of ultrashort laser pulses non-equilibrium energy distributions with large excess population in the excited states can be produced. The distinct physical processes which come into play in laser-solid interaction on the ultrafast time scale open new routes of modifying the structure and the morphology of materials and offer interesting perspectives in laser materials processing.