Surface plasmon polariton modulator with optimized active layer

A multilayered waveguide, which supports surface plasmon polaritons, is considered as an absorption modulator. The waveguide core consists of a silicon nitride layer and ultrathin layer with the varied carrier density embedded between two silver plates, which also serve as electrodes. Under applying voltage to electrodes the carrier density in the transparent conducting oxide layer (we study indium tin oxide - ITO) changes according to the Thomas-Fermi screening theory. We employ analytical solutions for a multilayered system as well as numerical simulations with the commercial software package CST Microwave Studio in the frequency domain. We explore different permittivities of the ITO layer, which can be achieved by utilizing different anneal conditions. To increase transmittance and enhance modulation depth or efficiency, we propose to pattern the continuous active layer. Dependence from the pattern size and filling factor of the active material are analyzed for tuned permittivity of the ITO layer. Direct simulation of the device functionality validates optimization design.