Fabrication of flexible polymer tubes for micro and nanofluidic applications

被引：37

作者：

Ilic, B

Czaplewski, D

Zalalutdinov, M

Schmidt, B

Craighead, HG

机构：

[1] Cornell Univ, Cornell Nanofabricat Facil, Sch App & Engn Phys, Ithaca, NY 14853 USA

[2] Cornell Univ, Cornell Nanofabricat Facil, Nanbiotechnol Ctr, Ithaca, NY 14853 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2002年 / 20卷 / 06期

关键词：

D O I：

10.1116/1.1526356

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

We describe a method for fabricating narrow, flexible, polymeric fluid conduction tubes with dimensions down to the 100 nm regime. Vapor deposited Parylene tubes of various dimensions were integrated into silicon substrates forming a microfluidic network. In one approach we replicated fluidic systems in polymer by detaching free-standing flexible Parylene tubes from the silicon mold. We demonstrated capillary flow and electrophoretic drive of ions through polymer tubes of up to 5 cm in length. (C) 2002 American Vacuum Society.

引用

收藏

页码：2459 / 2465

页数：7

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