Study of laser induced ablation with focused ion beam/scanning electron microscope devices

被引：22

作者：

Bussoli, Marco

Batani, Dimitri

Desai, Tara

Canova, Federico

Milani, Marziale

Trtica, Milan

Gakovic, Biljana

Krousky, Edouard

机构：

[1] Univ Milano Bicocca, Dipartimento Fis G Occhialini, I-20126 Milan, Italy

[2] Univ Milano Bicocca, Dipartimento Sci Mat, I-20126 Milan, Italy

[3] Univ Milano Bicocca, Bombay FIB SEM Lab, I-20126 Milan, Italy

[4] Vinca Inst Nucl Sci, Belgrade, Serbia

[5] PALS Res Ctr, Prague, Czech Republic

来源：

LASER AND PARTICLE BEAMS | 2007年 / 25卷 / 01期

关键词：

electron emission relaxation region; ion flux; laser plasma generation; laser power; plasma heating; plasma interaction; target heating;

D O I：

10.1017/S0263034607070139

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose the use of Focused Ion Beam/Scanning Electron Microscope (FIB/SEM) devices for the analysis of ablation results. Ablated samples have been obtained by irradiating an Al planar target with an optically smoothed iodine laser working at 0.44 mu m. The interpretation of FIB images shows the high potentiality of the technique.

引用

收藏

页码：121 / 125

页数：5

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