Structural features of laser ablation particulate from Si target, as revealed by focused ion beam technology

Heterogeneity in laser-induced particle structures was investigated by scanning electron microscopy (SEM) and transmission electron microscopy (TEM) of individual particles micro-machined using focused ion beam (FIB). The primary particle size distribution spanned over three orders of magnitude, i.e., in the range 10 nm-10 mum with few larger secondary objects. The particulate larger than 0.5 mum often resulted from particle-particle aggregation, mostly upon a spherical core, seldom in chain-like structures. The core of these fractal aggregates was found to be polycrystalline. The heterogeneity of the particles with respect to structure and chemistry is surely of importance for elemental analysis using laser ablation as sample introduction technique.