Three-dimensional microstructures created by laser microfabrication technology

被引：15

作者：

Horiyama, M

Sun, HB

Miwa, M

Matsuo, S

Misawa, H

机构：

[1] Univ Tokushima, Grad Sch Engn, Dept Ecosyst Engn, Tokushima 7708506, Japan

[2] Univ Tokushima, Satellite Venture Business Lab, Tokushima 7708506, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1999年 / 38卷 / 2B期

关键词：

laser microfabrication; stereolithography; micromachine; photopolymerization; microstructure;

D O I：

10.1143/JJAP.38.L212

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Three-dimensional microstructures with aspect ratios larger than 20 and a solidified wall with a thickness down to 2.0 mu m have been fabricated by the one-photon absorption photopolymerization technique. Lateral and longitudinal spatial resolutions in a single-line scanning process of as high as 1.0 mu m and 0.3 mu m, respectively, are reproducible. An experimental system consisting of a common picosecond pulsed laser and an optical microscope makes laser microfabrication easy to realize, implying a broad application potential.

引用

页码：L212 / L215

页数：4

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