SMA microgripper with integrated antagonism

被引：125

作者：

Kohl, M

Just, E

Pfleging, W

Miyazaki, S

机构：

[1] Forschungszentrum Karlsruhe, IMT, D-76021 Karlsruhe, Germany

[2] Univ Tsukuba, Inst Mat Sci, Tsukuba, Ibaraki 3058573, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 83卷 / 1-3期

关键词：

microgripper; shape memory actuator; monolithic microdevice; smart materials; TiNi cold-rolled sheets;

D O I：

10.1016/S0924-4247(99)00385-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

A microgripper of 2 x 3.9 x 0.1 mm(3) size is presented consisting of a single device microfabricated from a shape memory alloy (SMA) thin sheet. The device consists of two integrated actuation units of a stress-optimized shape, which actuate in opposite directions and thus form an antagonistic pair. The fabrication procedure is reduced to one micromachining step of a rolled SMA sheet and subsequent bonding onto a substrate. The maximum displacement of the gripping jaws is 180 mu m, the maximum gripping force 17 mN. For an electrical power of 22 mW, a response time of 32 ms is observed. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：208 / 213

页数：6

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