A percolation approach to dielectric breakdown statistics

被引:26
作者
Tanamoto, T
Toriumi, A
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 3B期
关键词
percolation theory; SiO2; reliability; polarity dependence; Si/SiO2; interface;
D O I
10.1143/JJAP.36.1439
中图分类号
O59 [应用物理学];
学科分类号
摘要
The stochastic breakdown model proposed by Niemeyer et al. has been improved by taking the time evolution into account in the two-dimensional lattice system. A Markov process has been assumed in the breakdown process and 'time' has been defined reflecting the distribution of broken bonds in the cluster. The change of breakdown patterns with time predicts various aspects of breakdown phenomena. We have shown that the final breakdown path does not always form a straight line. We have proposed one of the possible origins. for the polarity problem and shown that the polarity difference is understood by the relative position of the damaged layer to the starting point of breakdown.
引用
收藏
页码:1439 / 1442
页数:4
相关论文
共 5 条
[1]  
Degraeve R, 1995, INTERNATIONAL ELECTRON DEVICES MEETING, 1995 - IEDM TECHNICAL DIGEST, P863, DOI 10.1109/IEDM.1995.499353
[2]   FRACTAL DIMENSION OF DIELECTRIC-BREAKDOWN [J].
NIEMEYER, L ;
PIETRONERO, L ;
WIESMANN, HJ .
PHYSICAL REVIEW LETTERS, 1984, 52 (12) :1033-1036
[3]  
SATAKE H, 1995, 1995 INT C SOL STAT, P264
[4]   A FRACTAL MODEL OF DIELECTRIC-BREAKDOWN AND PREBREAKDOWN IN SOLID DIELECTRICS [J].
WIESMANN, HJ ;
ZELLER, HR .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (05) :1770-1773
[5]   A STOCHASTIC-MODEL FOR DIELECTRIC-BREAKDOWN IN THIN CAPACITORS [J].
WILLMING, DA ;
WU, CH .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (02) :456-459