Structure related properties of obliquely deposited amorphous a-As2S3 thin films

被引：19

作者：

Starbova, K

Dikova, J

Starbov, N

机构：

[1] Ctrl. Lab. of Photographic Processes, Bulgarian Academy of Sciences

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1997年 / 210卷 / 2-3期

关键词：

D O I：

10.1016/S0022-3093(96)00582-0

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The surface roughness and morphology growth of a-As2S3 films vacuum deposited within a large scale of vapor incidence angles are studied. The formation of a columnar structure at normal and oblique deposition is demonstrated. The relationship between the micromorphology of the films and their optical and mechanical properties is revealed for as grown and annealed samples.

引用

页码：261 / 266

页数：6

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