ZnO nanotube ethanol gas sensors

被引：71

作者：

Hsueh, Ting-Jen ^{[1
]}

Chang, Shoou-Jin ^{[1
]}

Hsu, Cheng-Liang ^{[2
]}

Lin, Yan-Ru ^{[3
]}

Chen, I. -Cherng ^{[4
]}

机构：

[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 70101, Taiwan

[2] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan

[3] Ming Chi Univ Technol, Dept Mat Engn, Taipei 24301, Taiwan

[4] Ind Technol Res Inst S, Micro Syst Technol Ctr, Tainan 709, Taiwan

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2008年 / 155卷 / 09期

关键词：

D O I：

10.1149/1.2952535

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

This investigation reports on the growth of ZnO nanotubes on patterned Au/Al(2)O(3)/Au/RuO(2) templates by reactive evaporation and the fabrication of a ZnO nanotube ethanol gas sensor. The as-grown ZnO nanotubes were polycrystalline and had holes at their terminals and sidewalls. Injection of ethanol gas reduced the resistivity of the fabricated sensor. Introducing 100 ppm ethanol gas increased the measured sensitivities of the ethanol gas sensors from 34 to 87% as the temperature increased from 90 to 230 degrees C. Additionally, the sensitivity of the sensor increased with the concentration of injected ethanol gas. (C) 2008 The Electrochemical Society.

引用

页码：K152 / K155

页数：4

共 24 条

[1] Investigations on the self-organized growth of TiO2 nanotube arrays by anodic oxidization [J].

Cai, Qingyun ;

Yang, Lixia ;

Yu, Yan .

THIN SOLID FILMS, 2006, 515 (04) :1802-1806

[2] PEG-assisted synthesis of ZnO nanotubes [J].

Duan, J ;

Huang, XT ;

Wang, E .

MATERIALS LETTERS, 2006, 60 (15) :1918-1921

[3] Synthesis and properties of multipod-shaped ZnO nanorods for gas-sensor applications [J].

Gao, T ;

Wang, TH .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (07) :1451-1454

[4] Crabwise ZnO nanowires: Growth and field emission properties [J].

Hsueh, Ting-Jen ;

Hsu, Cheng-Liang ;

Chang, Shoou-Jinn ;

Lu, Chien-Yuan ;

Lin, Yan-Ru ;

Chen, I. -Cherng .

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2007, 7 (03) :1076-1079

[5] Laterally grown ZnO nanowire ethanol gas sensors [J].

Hsueh, Ting-Jen ;

Hsu, Cheng-Liang ;

Chang, Shoou-Jinn ;

Chen, I-Cherng .

SENSORS AND ACTUATORS B-CHEMICAL, 2007, 126 (02) :473-477

[6] ZnO nanoparticle-modified infrared internal reflection elements for selective detection of volatile organic compounds [J].

Huang, GG ;

Wang, CT ;

Tang, HT ;

Huang, YS ;

Yang, J .

ANALYTICAL CHEMISTRY, 2006, 78 (07) :2397-2404

[7] Hydrogel-assisted synthesis of nanotubes and nanorods of US, ZnS and CuS, showing some evidence for oriented attachment [J].

Kalyanikutty, K. P. ;

Nikhila, M. ;

Maitra, Uday ;

Rao, C. N. R. .

CHEMICAL PHYSICS LETTERS, 2006, 432 (1-3) :190-194

[8] THE ROLE OF NOBLE-METALS IN THE CHEMISTRY OF SOLID-STATE GAS SENSORS [J].

KOHL, D .

SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) :158-165

[9] Catalytic growth of ZnO nanotubes [J].

Kong, XH ;

Sun, XM ;

Li, XL ;

Li, YD .

MATERIALS CHEMISTRY AND PHYSICS, 2003, 82 (03) :997-1001

[10] Fabrication of optically enhanced ZnO nanorods and microrods using novel biocatalysts [J].

Kumar, N ;

Dorfman, A ;

Hahm, J .

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2005, 5 (11) :1915-1918

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