Laterally grown ZnO nanowire ethanol gas sensors

被引:303
作者
Hsueh, Ting-Jen
Hsu, Cheng-Liang
Chang, Shoou-Jinn
Chen, I-Cherng [1 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Tainan 70101, Taiwan
[2] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan
[3] Micro Syst Technol Ctr, Ind Technol Res Inst S, Tainan 709, Taiwan
关键词
ZnO; nanowires; single nanowire; ethanol sensor; laterally grown nanowires;
D O I
10.1016/j.snb.2007.03.034
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We report the growth of ZnO nanowires on ZnO:Ga/glass templates and the fabrication of laterally grown ZnO nanowire ethanol sensors. It was found that growth direction of the nanowires depends strongly on growth parameters. It was also found that resistivity of the fabricated sensor decreased upon ethanol gas injection. By introducing 1500 ppm ethanol gas, it was found that the device response were around 20%, 35%, 58% and 61 % when the gas sensor was operated at 180 degrees C, 230 degrees C, 260 degrees C and 300 degrees C, respectively. It was also found that the device response at 300 degrees C were around 18%, 26%, 43%, 55% and 61 % when the concentration of injected ethanol gas was 50 ppm, 100 ppm, 500 ppm, 1000 ppm and 1500 ppm, respectively. (C) 2007 Published by Elsevier B.V.
引用
收藏
页码:473 / 477
页数:5
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