High-temperature tensile tests and activation volume measurement of free-standing submicron Al films

被引:18
作者
Kalkman, AJ
Verbruggen, AH
Radelaar, S
机构
[1] Delft Univ Technol, Dept Appl Phys, NL-2628 CJ Delft, Netherlands
[2] Delft Univ Technol, DIMES, NL-2628 CJ Delft, Netherlands
[3] Netherlands Inst Met Res, NL-2628 AL Delft, Netherlands
关键词
D O I
10.1063/1.1518783
中图分类号
O59 [应用物理学];
学科分类号
摘要
Tensile tests on free-standing, 200-nm-thick Al films were conducted between room temperature and 200 degreesC. Applied strain rates were in the range 1x10(-8)-2x10(-6)/s. At a temperature of 200 degreesC a saturation of the flow stress was observed. The strain required to achieve steady-state saturation is of the order of 2x10(-3), which is much smaller than for bulk Al. From the observed strain rate sensitivity of the saturation stress we calculate an activation volume Omega(act)=60b(3), which is small compared to the value of 700b(3) observed in bulk Al (b is the magnitude of Burgers vector). (C) 2002 American Institute of Physics.
引用
收藏
页码:6612 / 6615
页数:4
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