Charge-induced conductance modulation of carbon nanotube field effect transistor memory devices

被引:13
作者
Chan, Mei Yin [1 ,2 ]
Wei, Li [3 ]
Chen, Yuan [3 ]
Chan, Lap [2 ]
Lee, Pooi See [1 ]
机构
[1] Nanyang Technol Univ, Sch Mat Sci & Engn, Singapore 639798, Singapore
[2] Chartered Semicond Mfg Ltd, Singapore 738406, Singapore
[3] Nanyang Technol Univ, Sch Chem & Biomed Engn, Singapore 637459, Singapore
关键词
ELECTRONICS;
D O I
10.1016/j.carbon.2009.07.017
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We effectively tailored the charge trapping and transport behavior of a carbon nanotube field effect transistor memory device using charge interaction with underlying Ge nanoparticles in a HfO2 high-K dielectric. We also suggest a new route for modulating the Schottky barrier at the nanotube-electrode interface with localized charge trapping in discrete nanoparticles. This modification leads to an effective increase in the read-out conductance ratio of two to three orders magnitude under low voltage operation, associated with a large memory window of similar to 5.3V. Furthermore, we achieved a more controllable and reliable memory effect due to stable charge storage in deep nanoparticle traps, as compared to shallow HfO2 defect states. (C) 2009 Elsevier Ltd. All rights reserved.
引用
收藏
页码:3063 / 3070
页数:8
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