Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods

被引：46

作者：

Kong, Bo Hyun ^{[1
]}

Choi, Mi Kyung ^{[1
]}

Cho, Hyung Koun ^{[1
]}

Kim, Jae Hyun ^{[2
]}

Baek, Sungho ^{[2
]}

Lee, Jung-Ho ^{[3
]}

机构：

[1] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Gyeonggi 440746, South Korea

[2] Daegu Gyeongbuk Inst Sci & Technol, Dept Nano & Bio Technol, Taegu 704230, South Korea

[3] Hanyang Univ, Dept Chem Engn, Ansan 426791, Kyounggi, South Korea

来源：

ELECTROCHEMICAL AND SOLID STATE LETTERS | 2010年 / 13卷 / 02期

基金：

新加坡国家研究基金会;

关键词：

ATOMIC LAYER DEPOSITION; LIGHT-EMITTING DEVICES; SOLAR-CELLS; SILICON NANOWIRES; THIN-FILMS; OXIDE; ABSORPTION; SCATTERING;

D O I：

10.1149/1.3267051

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Al-doped ZnO (AZO) thin films were grown by atomic layer deposition (ALD) for use as transparent conductive oxides on high aspect ratio Si microrod arrays. The ALD-deposited AZO films showed high optical transmittance and electrical conductivity despite their polycrystalline structures and resulted in a superior conformal coating on the surface and side regions of the Si microrods. The films also exhibited an electrical performance identical to that of the AZO film on a flat Si substrate. These results revealed that ALD-deposited AZO films are promising candidates for electrodes in the next-generation optoelectronic devices based on low dimensional structures, which require conformal coating. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3267051] All rights reserved.

引用

页码：K12 / K14

页数：3

共 24 条

[1] Atomic Layer Deposition of Undoped and Al-Doped ZnO Thin Films Using the Zn Alkoxide Precursor Methylzinc lsopropoxide [J].

An, Ki-Seok ;

Cho, Wontae ;

Lee, Byung Kook ;

Lee, Sun Sook ;

Kim, Chang Gyoun .

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2008, 8 (09) :4856-4859

[2] n-ZnO:Ga/i-ZnO/p-Si heterojunction light emitting diodes fabricated on patterned Si substrates [J].

Choi, Mi Kyung ;

Han, Won Suk ;

Kim, Young Yi ;

Kong, Bo Hyun ;

Cho, Hyung Koun ;

Kim, Jae Hyun ;

Seo, Hong-Seok ;

Kim, Kang-Pil ;

Lee, Jung-Ho .

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2009, 20 (12) :1214-1218

[3] Diameter-controlled synthesis of single-crystal silicon nanowires [J].

Cui, Y ;

Lauhon, LJ ;

Gudiksen, MS ;

Wang, JF ;

Lieber, CM .

APPLIED PHYSICS LETTERS, 2001, 78 (15) :2214-2216

[4] Doping and electrical transport in silicon nanowires [J].

Cui, Y ;

Duan, XF ;

Hu, JT ;

Lieber, CM .

JOURNAL OF PHYSICAL CHEMISTRY B, 2000, 104 (22) :5213-5216

[5] Aluminum-doped zinc oxide films as transparent conductive electrode for organic light-emitting devices [J].

Jiang, X ;

Wong, FL ;

Fung, MK ;

Lee, ST .

APPLIED PHYSICS LETTERS, 2003, 83 (09) :1875-1877

[6] Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells -: art. no. 114302 [J].

Kayes, BM ;

Atwater, HA ;

Lewis, NS .

JOURNAL OF APPLIED PHYSICS, 2005, 97 (11)

[7] Multidimensional ZnO light-emitting diode structures grown by metal organic chemical vapor deposition on p-Si [J].

Kim, Dong Chan ;

Han, Won Suk ;

Cho, Hyung Koun ;

Kong, Bo Hyun ;

Kim, Hyoung Sub .

APPLIED PHYSICS LETTERS, 2007, 91 (23)

[8] Electrical characteristics and stability of gold and palladium Schottky contacts on ZnO nanorods [J].

Klason, P. ;

Nur, O. ;

Willander, M. .

NANOTECHNOLOGY, 2008, 19 (47)

[9] High-mobility hydrogen-doped In2O3 transparent conductive oxide for a-Si:H/c-Si heterojunction solar cells [J].

Koida, T. ;

Fujiwara, H. ;

Kondo, M. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2009, 93 (6-7) :851-854

[10] Analysis of light scattering in amorphous Si:H solar cells by a one-dimensional semi-coherent optical model [J].

Krc, J ;

Smole, F ;

Topic, M .

PROGRESS IN PHOTOVOLTAICS, 2003, 11 (01) :15-26

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