Aluminum-doped zinc oxide films as transparent conductive electrode for organic light-emitting devices

被引:525
作者
Jiang, X
Wong, FL
Fung, MK
Lee, ST [1 ]
机构
[1] City Univ Hong Kong, Ctr Super Diamond & Adv Thin Films COSDAF, Hong Kong, Hong Kong, Peoples R China
[2] City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R China
[3] Univ Siegen, Inst Mat Engn, D-57068 Siegen, Germany
[4] Fraunhofer Inst Surface Engn & Thin Films, D-38108 Braunschweig, Germany
关键词
D O I
10.1063/1.1605805
中图分类号
O59 [应用物理学];
学科分类号
摘要
Highly transparent conductive, aluminum-doped zinc oxide (ZnO:Al) films were deposited on glass substrates by midfrequency magnetron sputtering of metallic aluminum-doped zinc target. ZnO:Al films with surface work functions between 3.7 and 4.4 eV were obtained by varying the sputtering conditions. Organic light-emitting diodes (OLEDs) were fabricated on these ZnO:Al films. A current efficiency of higher than 3.7 cd/A, was achieved. For comparison, 3.9 cd/A was achieved by the reference OLEDs fabricated on commercial indium-tin-oxide substrates. (C) 2003 American Institute of Physics.
引用
收藏
页码:1875 / 1877
页数:3
相关论文
共 14 条
  • [1] Characterization of transparent conducting oxides
    Coutts, TJ
    Young, DL
    Li, XN
    [J]. MRS BULLETIN, 2000, 25 (08) : 58 - 65
  • [2] THE ELECTRICAL AND OPTICAL-PROPERTIES OF THE ZNO-SNO2 THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
    ENOKI, H
    NAKAYAMA, T
    ECHIGOYA, J
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1992, 129 (01): : 181 - 191
  • [3] HARTNAGEL H., 1995, Semiconducting Transparent Thin Films
  • [4] New n-type transparent conducting oxides
    Minami, T
    [J]. MRS BULLETIN, 2000, 25 (08) : 38 - 44
  • [5] Transparent and conductive multicomponent oxide films prepared by magnetron sputtering
    Minami, T
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (04): : 1765 - 1772
  • [6] Preparation of transparent and conductive In2O3-ZnO films by radio frequency magnetron sputtering
    Minami, T
    Kakumu, T
    Takata, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (03): : 1704 - 1708
  • [7] New transparent conducting MgIn2O4-Zn2In2O5 thin films prepared by magnetron sputtering
    Minami, T
    Takata, S
    Kakumu, T
    Sonohara, H
    [J]. THIN SOLID FILMS, 1995, 270 (1-2) : 22 - 26
  • [8] Transparent conducting impurity-co-doped ZnO:Al thin films prepared by magnetron sputtering
    Minami, T
    Suzuki, S
    Miyata, T
    [J]. THIN SOLID FILMS, 2001, 398 : 53 - 58
  • [9] Stability of transparent conducting oxide films for use at high temperatures
    Minami, T
    Miyata, T
    Yamamoto, T
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (04): : 1822 - 1826
  • [10] HIGHLY TRANSPARENT AND CONDUCTIVE ZINC-STANNATE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
    MINAMI, T
    SONOHARA, H
    TAKATA, S
    SATO, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1994, 33 (12A): : L1693 - L1696