Replication of high-aspect-ratio nanopillar array for biomimetic gecko foot-hair prototype by UV nano embossing with anodic aluminum oxide mold

被引:60
作者
Kim, Dong Sung
Lee, Hyun Sup
Lee, Junghyun
Kim, Sungjoo
Lee, Kun-Hong
Moon, Wonkyu
Kwon, Tai Hun
机构
[1] Pohang Univ Sci & Technol, Dept Mech Engn, Pohang 790784, South Korea
[2] Pohang Univ Sci & Technol, Res Ctr Micro Mech Syst, Pohang 790784, South Korea
[3] Pohang Univ Sci & Technol, Dept Chem Engn, Pohang 790784, South Korea
来源
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2007年 / 13卷 / 5-6期
关键词
D O I
10.1007/s00542-006-0220-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we present a simple and cost-effective replication method of high-aspect-ratio polymer nanopillar array as a biomimetic gecko's foot hair prototype. A UV nano embossing process was applied for the replication of polymer nanopillar arrays. Highly ordered straight nanoporous AAO (anodic aluminum oxide) templates were utilized as reusable master molds. Densely arranged high-aspect-ratio nanopillar arrays have been successfully fabricated by means of the UV nano embossing process with the AAO mold. Pull-off force measurements were carried out to characterize the adhesive force of the replicated nanopillar arrays on the polymer substrates based on the force-distance curves obtained from the atomic force microscope (AFM) with a modified AFM cantilever. The force measurement results showed that the larger diameter and the taller height of the nanopillars result in the larger adhesive force.
引用
收藏
页码:601 / 606
页数:6
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