Carbon films with high density nanotubes produced using microwave plasma assisted CVD

被引：40

作者：

Zhang, Q ^{[1
]}

Yoon, SF ^{[1
]}

Ahn, J ^{[1
]}

Gan, B ^{[1
]}

Rusli ^{[1
]}

Yu, MB ^{[1
]}

机构：

[1] Nanyang Technol Univ, Ctr Microelect, Singapore 2263, Singapore

来源：

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS | 2000年 / 61卷 / 07期

关键词：

microstructure; PECVD; Raman effect; SEM; XRD;

D O I：

10.1016/S0022-3697(99)00383-2

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The preparation of massive carbon nanotubes on silicon, quartz and ceramic substrates using microwave plasma enhanced CVD is reported. The nanotubes, ranging from 10 to 120 nm in diameter and a few tens of microns in length, were formed under hydrocarbon plasma at 720 degrees C with the aid of iron-oxide particles. It is found that the morphology of the nanotubes is strongly influenced by the now ratio of methane to hydrogen. Defect-less nanotubes with small diameters are favourably produced under a small flow ratio. In contrast, defect-rich nanotubes with large diameters and highly disordered growth directions are formed at a large flow ratio. (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：1179 / 1183

页数：5

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