Carbon films with high density nanotubes produced using microwave plasma assisted CVD

被引：40

作者：

Zhang, Q ^{[1
]}

Yoon, SF ^{[1
]}

Ahn, J ^{[1
]}

Gan, B ^{[1
]}

Rusli ^{[1
]}

Yu, MB ^{[1
]}

机构：

[1] Nanyang Technol Univ, Ctr Microelect, Singapore 2263, Singapore

来源：

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS | 2000年 / 61卷 / 07期

关键词：

microstructure; PECVD; Raman effect; SEM; XRD;

D O I：

10.1016/S0022-3697(99)00383-2

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The preparation of massive carbon nanotubes on silicon, quartz and ceramic substrates using microwave plasma enhanced CVD is reported. The nanotubes, ranging from 10 to 120 nm in diameter and a few tens of microns in length, were formed under hydrocarbon plasma at 720 degrees C with the aid of iron-oxide particles. It is found that the morphology of the nanotubes is strongly influenced by the now ratio of methane to hydrogen. Defect-less nanotubes with small diameters are favourably produced under a small flow ratio. In contrast, defect-rich nanotubes with large diameters and highly disordered growth directions are formed at a large flow ratio. (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：1179 / 1183

页数：5

共 25 条

[11] HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].

IIJIMA, S .

NATURE, 1991, 354 (6348) :56-58

[12] RESONANCE RAMAN AND INFRARED-SPECTROSCOPY OF CARBON NANOTUBUES [J].

KASTNER, J ;

PICHLER, T ;

KUZMANY, H ;

CURRAN, S ;

BLAU, W ;

WELDON, DN ;

DELAMESIERE, M ;

DRAPER, S ;

ZANDBERGEN, H .

CHEMICAL PHYSICS LETTERS, 1994, 221 (1-2) :53-58

[13] Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers [J].

Kong, J ;

Soh, HT ;

Cassell, AM ;

Quate, CF ;

Dai, HJ .

NATURE, 1998, 395 (6705) :878-881

[14] Electron spin resonance study of carbon nanotubes [J].

Kotosonov, AS ;

Shilo, DV .

CARBON, 1998, 36 (11) :1649-1651

[15] Vibrational spectra of single wall carbon nanotubes [J].

Kuzmany, H ;

Burger, B ;

Thess, A ;

Shalley, RE .

CARBON, 1998, 36 (5-6) :709-712

[16] Carbon nanotubes: The solar approach [J].

Laplaze, D ;

Bernier, P ;

Maser, WK ;

Flamant, G ;

Guillard, T ;

Loiseau, A .

CARBON, 1998, 36 (5-6) :685-688

[17] 1ST-ORDER AND 2ND-ORDER RAMAN-SCATTERING FROM FINITE-SIZE CRYSTALS OF GRAPHITE [J].

NEMANICH, RJ ;

SOLIN, SA .

PHYSICAL REVIEW B, 1979, 20 (02) :392-401

[18] Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition [J].

Qin, LC ;

Zhou, D ;

Krauss, AR ;

Gruen, DM .

APPLIED PHYSICS LETTERS, 1998, 72 (26) :3437-3439

[19] Diameter-selective Raman scattering from vibrational modes in carbon nanotubes [J].

Rao, AM ;

Richter, E ;

Bandow, S ;

Chase, B ;

Eklund, PC ;

Williams, KA ;

Fang, S ;

Subbaswamy, KR ;

Menon, M ;

Thess, A ;

Smalley, RE ;

Dresselhaus, G ;

Dresselhaus, MS .

SCIENCE, 1997, 275 (5297) :187-191

[20] Synthesis of large arrays of well-aligned carbon nanotubes on glass [J].

Ren, ZF ;

Huang, ZP ;

Xu, JW ;

Wang, JH ;

Bush, P ;

Siegal, MP ;

Provencio, PN .

SCIENCE, 1998, 282 (5391) :1105-1107

← 1 2 3 →