Suspension handling system

被引：9

作者：

Baechi, D

Buser, R

机构：

[1] Swiss Fed Inst Technol, Inst Mech, CH-8092 Zurich, Switzerland

[2] Interstate Univ Appl Sci Buchs, Inst Microsyst Technol, CH-9471 Buchs, Switzerland

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 63卷 / 03期

关键词：

MEMS-microvalve array; fluid-flow control; silicones; polymeric membranes; microchannels;

D O I：

10.1016/S0925-4005(00)00357-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A new idea of particle handling is proposed here, consisting of a matrix of mechanical gates. The particle sizes that can be handled range from the sub-micron scale to a few microns. The suspension-handling device consists of a silicon chip encapsulated by two glass chips. A free standing silicone membrane with a thickness of 2 mu m is used to reduce the cross-sections of channels with a size of 40 x 10 mu m. We could show that the flow of micron-sized particles in the channels can be monitored and controlled by actuating the valves. The density of valves is 600 valves/in.(2) in our first prototype. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：195 / 200

页数：6

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