Local electrostatic effects of surface structure on field emission

被引:9
作者
Jaeger, DL
Hren, JJ
Zhirnov, VV
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] Semicond Res Corp, Res Triangle Pk, NC 27709 USA
关键词
D O I
10.1063/1.1526934
中图分类号
O59 [应用物理学];
学科分类号
摘要
We examined the classical electrostatic effects due to geometric surface structures on conductive field emission needles numerically using the finite element method and compared our results to several commonly applied analytic relations. Analysis of the morphology of electrochemically prepared Mo needles by high-resolution transmission electron microscopy was incorporated in the numerical analysis in the form of small surface protrusions and gross needle shape. We found that the error between the electrostatic potential defined by popular analytic equations and both analytic equations derived in prolate spheroidal coordinates and finite element method results was significant for ellipsoidal needles with and without surface protrusions. The morphology of the surface protrusion was found to introduce a significant nonlinear potential barrier near the needle surface. Finally we numerically analyzed a nonsymmetric, nonhomogeneous experimental needle indicating that even larger errors in the electrostatic potential can be expected relative to analytic equations. (C) 2003 American Institute of Physics.
引用
收藏
页码:691 / 697
页数:7
相关论文
共 26 条
[1]   NUMERICAL-ANALYSIS ON FIELD-EMISSION FOR THE EFFECTS OF THE GATE INSULATORS [J].
AHN, HY ;
LEE, CG ;
LEE, JD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02) :540-544
[2]  
[Anonymous], 1961, FIELD EMISSION FIELD
[3]   3D CALCULATIONS AT ATOMIC SCALE OF THE ELECTROSTATIC POTENTIAL AND FIELD CREATED BY A TETON TIP [J].
ATLAN, D ;
GARDET, G ;
BINH, VT ;
GARCIA, N ;
SAENZ, JJ .
ULTRAMICROSCOPY, 1992, 42 :154-162
[4]   Nanotips and nanomagnetism [J].
Binh, VT ;
Purcell, ST ;
Semet, V ;
Feschet, F .
APPLIED SURFACE SCIENCE, 1998, 130 :803-814
[5]   Microscopy and computational modelling to elucidate the enhancement factor for field electron emitters [J].
Edgcombe, CJ ;
Valdrè, U .
JOURNAL OF MICROSCOPY, 2001, 203 (02) :188-194
[6]   Low-macroscopic-field electron emission from carbon films and other electrically nanostructured heterogeneous materials: hypotheses about emission mechanism [J].
Forbes, RG .
SOLID-STATE ELECTRONICS, 2001, 45 (06) :779-808
[7]  
Galdetskiy A, 1997, IVMC'97 - 1997 10TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, P598
[8]   USE OF BOUNDARY-ELEMENT METHODS IN-FIELD EMISSION COMPUTATIONS [J].
HARTMAN, RL ;
MACKIE, WA ;
DAVIS, PR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02) :754-758
[9]   HIGH-RESOLUTION SIMULATION OF FIELD-EMISSION [J].
HERRMANNSFELDT, WB ;
BECKER, R ;
BRODIE, I ;
ROSENGREEN, A ;
SPINDT, CA .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 298 (1-3) :39-44
[10]   Properties of electron field emission from a fractal surface [J].
Isayeva, OB ;
Eliseev, MV ;
Rozhnev, AG ;
Ryskin, NM .
SOLID-STATE ELECTRONICS, 2001, 45 (06) :871-877