Highly adhesive layered molybdenum oxide thin films prepared on a silicon substrate using suitable buffer materials

被引：16

作者：

Itoh, Toshio ^{[1
]}

Matsubara, Ichiro ^{[1
]}

Shin, Woosuck ^{[1
]}

Izu, Noriya ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, AIST, Moriyama Ku, Nagoya, Aichi 4638560, Japan

来源：

THIN SOLID FILMS | 2006年 / 515卷 / 04期

关键词：

layered organic-inorganic hybrid; molybdenum trioxide; intercalation; buffer layer;

D O I：

10.1016/j.tsf.2006.08.005

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

MoO3 and organic/MoO3 hybrid thin films were prepared on a silicon substrate with an LaAlO3 or a CeO2 buffer layer. The MoO3 thin film, which was deposited by chemical vapor deposition, was soaked in an aqueous sodium hydrosulfite solution and aqueous butylammonium (BuNH3) solution to prepare (BuNH3)(x)MoO3 hybrid thin films. The high b-axis-oriented MoO3 gains was crucial in preventing the thin film from peeling off due to expansion of its interlayers during the intercalation process. Highly b-axis-oriented MoO3 grains can be deposited on the buffer layer at high temperatures, indicating that the film can work as a gas-sensing element. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：2709 / 2716

页数：8

共 26 条

[1] Anion exchange of methyl orange into Zn-Al synthetic hydrotalcite and photophysical characterization of the intercalates obtained [J].

Costantino, U ;

Coletti, N ;

Nocchetti, M ;

Aloisi, GG ;

Elisei, F .

LANGMUIR, 1999, 15 (13) :4454-4460

[2] Molybdenum oxide as a molecular sieve towards nitrogen containing molecules:: synthesis and characterization of MoO3 intercalation compounds with nicotinamide and hexamethylenetetramine [J].

de Farias, RF .

MATERIALS CHEMISTRY AND PHYSICS, 2005, 90 (2-3) :302-309

[3]

Goward GR, 1998, ADV MATER, V10, P449, DOI 10.1002/(SICI)1521-4095(199804)10:6<449::AID-ADMA449>3.0.CO

[4]

2-E

[5] Ligand influences on the structures of molybdenum oxide networks [J].

Hagrman, PJ ;

LaDuca, RL ;

Koo, HJ ;

Rarig, R ;

Haushalter, RC ;

Whangbo, MH ;

Zubieta, J .

INORGANIC CHEMISTRY, 2000, 39 (19) :4311-4317

[6] Synthesis of polypyrrole/MoO3 hybrid thin films and their volatile organic compound gas-sensing properties [J].

Hosono, K ;

Matsubara, I ;

Murayama, N ;

Woosuck, S ;

Izu, N .

CHEMISTRY OF MATERIALS, 2005, 17 (02) :349-354

[7] Reversible color changes in lamella hybrids of poly(diacetylenecarboxylates) incorporated in layered double hydroxide nanosheets [J].

Itoh, T ;

Shichi, T ;

Yui, T ;

Takahashi, H ;

Inui, Y ;

Takagi, K .

JOURNAL OF PHYSICAL CHEMISTRY B, 2005, 109 (08) :3199-3206

[8] Investigation of CVD molybdenum oxide films [J].

Ivanova, T ;

Surtchev, M ;

Gesheva, K .

MATERIALS LETTERS, 2002, 53 (4-5) :250-257

[9] Spectroscopic characterization of CVD-molybdenum oxide films [J].

Ivanova, T ;

Szekeres, A ;

Gartner, M ;

Gogova, D ;

Gesheva, KA .

ELECTROCHIMICA ACTA, 2001, 46 (13-14) :2215-2219

[10] Clay nanolayer reinforcement of a silicone elastomer [J].

LeBaron, PC ;

Pinnavaia, TJ .

CHEMISTRY OF MATERIALS, 2001, 13 (10) :3760-3765

← 1 2 3 →