Photoexcitation-electron-paramagnetic-resonance studies of the carbon vacancy in 4H-SiC

被引:68
作者
Son, NT [1 ]
Magnusson, B
Janzén, E
机构
[1] Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden
[2] Okmet AB, SE-58330 Linkoping, Sweden
关键词
D O I
10.1063/1.1522822
中图分类号
O59 [应用物理学];
学科分类号
摘要
Photoexcitation-electron-paramagnetic-resonance (photo-EPR) studies were performed on p-type 4H-SiC irradiated with 2.5 MeV electrons. At W-band frequencies (similar to95 GHz) different EPR spectra could be well separated, allowing a reliable determination of the ground state levels of the associated defects. The photo-EPR results obtained for the positively charged carbon vacancy (V-C(+)) can be explained by a deep donor model with the (+/0) level located at (1.47+/-0.06) eV above the valence band. (C) 2002 American Institute of Physics.
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页码:3945 / 3947
页数:3
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