The angular distribution of gold selfsputtered under thermal-spike conditions

被引:14
作者
Andersen, HH [1 ]
Johansen, A [1 ]
Touboltsev, VS [1 ]
机构
[1] Niels Bohr Inst, Orsted Lab, DK-2100 Copenhagen O, Denmark
关键词
sputtering; angular distributions; spikes;
D O I
10.1016/S0168-583X(99)01067-8
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The angular distribution of gold self-sputtered at room temperature by 10-30 keV/atom Au-, Au-2(-) and Au-3(-) has been measured. The targets were optically mirror-like films evaporated on glass substrates. For substrates cooled to nitrogen temperature (77 K) during evaporation the targets were nearly texture-free, while holding the substrates at room temperature (or slightly above) resulted in heavily [1 1 1] textured target films. Angular distributions were determined through collection of the sputtered material on hemicylindrical aluminium films followed by RES quantification of the collected material. The sputtered distributions from cluster bombardment of non-textured targets were found to be substantially more isotropic than the distributions stemming from atomic bombardment. This rules out the non-linear, presumably spike-produced, component to be caused by an outward directed jet of material. Distributions sputtered from a heavily textured sample show the amount of material preferentially emitted in the [1 1 0] directions to be linear in the number of atoms in the cluster, hence showing that the linear and non-linear yield components are additive. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:727 / 732
页数:6
相关论文
共 23 条
[1]  
Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145
[2]   NONLINEAR EFFECTS IN HEAVY-ION SPUTTERING [J].
ANDERSEN, HH ;
BAY, HL .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (02) :953-954
[3]   ANGULAR-DISTRIBUTION OF PARTICLES SPUTTERED FROM CU, PT AND GE TARGETS BY KEV AR+ ION-BOMBARDMENT [J].
ANDERSEN, HH ;
STENUM, B ;
SORENSEN, T ;
WHITLOW, HJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (03) :459-465
[4]   Giant metal sputtering yields induced by 20-5000 keV atom gold clusters [J].
Andersen, HH ;
Brunelle, A ;
Della-Negra, S ;
Depauw, J ;
Jacquet, D ;
Le Beyec, Y ;
Chaumont, J ;
Bernas, H .
PHYSICAL REVIEW LETTERS, 1998, 80 (24) :5433-5436
[5]   HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J].
ANDERSEN, HH ;
BAY, HL .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) :2416-2422
[6]   SURFACE SEGREGATION DURING ALLOY SPUTTERING AND IMPLANTATION [J].
ANDERSEN, HH ;
STENUM, B ;
SORENSEN, T ;
WHITLOW, HJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :487-494
[7]  
ANDERSEN HH, 1988, NUCL I METH B, V33, P285
[8]  
ANDERSEN HH, 1993, VIDENSK SELSK MAT FY, V43, P127
[9]  
ANDERSEN HT, IN PRESS
[10]   Fundamental aspects of defect production in solids [J].
Averback, RS ;
Ghaly, M .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 :1-11