SURFACE SEGREGATION DURING ALLOY SPUTTERING AND IMPLANTATION

被引：91

作者：

ANDERSEN, HH ^{[1
]}

STENUM, B ^{[1
]}

SORENSEN, T ^{[1
]}

WHITLOW, HJ ^{[1
]}

机构：

[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

One of us; (HJW) acknowledges support from a NATO post doctoral Fellowship;

D O I：

10.1016/0167-5087(83)90843-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：487 / 494

页数：8

共 39 条

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ANDERSEN, HH ;

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[4] MEASUREMENTS OF ANGULAR-DISTRIBUTIONS OF SPUTTERED MATERIAL AS A NEW TOOL FOR SURFACE-SEGREGATION STUDIES - SEGREGATION IN CUPT ALLOYS [J].

ANDERSEN, HH ;

CHERNYSH, V ;

STENUM, B ;

SORENSEN, T ;

WHITLOW, HJ .

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[5]

ANDERSEN HH, ION IMPLANTATION BEA

[6]

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[7]

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[8]

ANDERSEN HH, 1980, SPIG 1980, P421

[9]

ANDERSEN HH, 1972, RADIAT EFF, V13, P67

[10]

Bottiger J., 1971, Radiation Effects, V11, P61, DOI 10.1080/00337577108230450

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