SURFACE SEGREGATION DURING ALLOY SPUTTERING AND IMPLANTATION

被引:91
作者
ANDERSEN, HH [1 ]
STENUM, B [1 ]
SORENSEN, T [1 ]
WHITLOW, HJ [1 ]
机构
[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词
One of us; (HJW) acknowledges support from a NATO post doctoral Fellowship;
D O I
10.1016/0167-5087(83)90843-8
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
38
引用
收藏
页码:487 / 494
页数:8
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