Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting

被引：220

作者：

Shen, Dongna

Park, Jung-Hyun

Noh, Joo Hyon

Choe, Song-Yul

Kim, Seung-Hyun ^{[2
]}

Wikle, Howard C., III

Kim, Dong-Joo ^{[1
]}

机构：

[1] Auburn Univ, Dept Mech Engn, Mat Res & Educ Ctr, Auburn, AL 36849 USA

[2] Inostek Inc, Ansan 425791, Gyeonggi, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2009年 / 154卷 / 01期

基金：

美国国家科学基金会;

关键词：

PZT; MEMS; SOI; Vibration; Energy harvesting; Cantilever; POWER GENERATOR; FILM;

D O I：

10.1016/j.sna.2009.06.007

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A PZT piezoelectric cantilever with a micromachined Si proof mass is designed and fabricated for a low frequency vibration energy harvesting application. The SiO2 layer in the SOI wafer promotes accurate control of the silicon thickness that is used as a supporting layer in the cantilever beam structure. The entire effective volume of the fabricated device is about 0.7690 mm(3). When excited at 0.75g(g=9.81 m/s(2)) acceleration amplitude at its resonant frequency of 183.8 Hz, the AC output measured across a resistive load of 16 k Omega connecting to the device in parallel has an amplitude of 101 mV. The average power and power density determined by the same measurement conditions are, respectively, 0.32 mu W and 416 mu W/cm(3). (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：103 / 108

页数：6

共 13 条

[11] The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting [J].