Enhancement of Jc and crystal alignment by reverse ISD method

A new deposition technique, 'reverse' inclined substrate deposition (RISD), was introduced to reduce the <100> tilt angle of the buffer layer against the substrate normal, originated by the conventional ISD method. The tilt angles of both superconducting layer and cap layer were successfully reduced. The J(c), values were enhanced by the RISD method. The Jc values of RISD samples were approximately two times as high as those of ISD samples. The cap layer was also deposited on both ISD and RISD buffer layers. Both (100) tilt angle and in-plane orientation were improved by the RISD. (C) 2002 Elsevier Science B.V. All rights reserved.