Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments

被引：313

作者：

Maboudian, R ^{[1
]}

Ashurst, WR ^{[1
]}

Carraro, C ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 82卷 / 1-3期

基金：

美国国家科学基金会;

关键词：

stiction; SAM; adhesion; friction;

D O I：

10.1016/S0924-4247(99)00337-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization and reliability of many micro-electro-mechanical systems (MEMS) devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics of the coated microstructures are described, followed by a discussion of the current limitations, areas for improvements and recent progress for this coating technology. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：219 / 223

页数：5

共 23 条

[1]

CABUZ C, IN PRESS SENS ACTU A

[2]

CABUZ C, 1998, P 1998 SOL STAT SENS, P296

[3] Observation of three growth mechanisms in self-assembled monolayers [J].

Carraro, C ;

Yauw, OW ;

Sung, MM ;

Maboudian, R .

JOURNAL OF PHYSICAL CHEMISTRY B, 1998, 102 (23) :4441-4445

[4] PERFORMANCE IMPACT OF MONOLAYER COATING OF POLYSILICON MICROMOTORS [J].

DENG, K ;

COLLINS, RJ ;

MEHREGANY, M ;

SUKENIK, CN .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (04) :1278-1285

[5] Lubrication of digital micromirror devices™ [J].

Henck, Steven A. .

TRIBOLOGY LETTERS, 1997, 3 (03) :239-247

[6]

HOUSTON MR, 1996, P IEEE SOL STAT SENS, P42

[7]

LIM M, 1990, THESIS U CALIFORNIA

[8]

Lim M. G., 1990, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4), P82, DOI 10.1109/MEMSYS.1990.110254

[9] Adhesion and friction issues associated with reliable operation of MEMS [J].

Maboudian, R .

MRS BULLETIN, 1998, 23 (06) :47-51

[10]

Maboudian R, 1998, SURF SCI REP, V30, P209

← 1 2 3 →