Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments

被引：313

作者：

Maboudian, R ^{[1
]}

Ashurst, WR ^{[1
]}

Carraro, C ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 82卷 / 1-3期

基金：

美国国家科学基金会;

关键词：

stiction; SAM; adhesion; friction;

D O I：

10.1016/S0924-4247(99)00337-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization and reliability of many micro-electro-mechanical systems (MEMS) devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics of the coated microstructures are described, followed by a discussion of the current limitations, areas for improvements and recent progress for this coating technology. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：219 / 223

页数：5