Accumulation hole layer in p-GaN/AlGaN heterostructures

被引:52
作者
Shur, MS
Bykhovski, AD
Gaska, R [1 ]
Yang, JW
Simin, G
Khan, MA
机构
[1] Rensselaer Polytech Inst, Ctr Integrated Elect & Elect Mfg, Troy, NY 12180 USA
[2] Rensselaer Polytech Inst, Dept Elect Comp & Syst Engn, Troy, NY 12180 USA
[3] Univ S Carolina, Dept Elect & Comp Engn, Columbia, SC 29208 USA
关键词
D O I
10.1063/1.126579
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present the results on piezoelectric and pyroelectric doping in AlGaN-on-GaN and GaN-on-AlGaN heterostructures and demonstrate p-GaN/AlGaN structures with accumulation hole layer. Our results indicate that polarization charge can induce up to 5x10(13) cm(-2) holes at the AlGaN/GaN heterointerfaces. We show that the transition from three-dimensional (3D) to two-dimensional (2D) hole gas can be only achieved for hole sheet densities on the order of 10(13) cm(-2) or higher. At lower densities, only 3D-hole accumulation layer may exist. These results suggest that a piezoelectrically induced 2D-hole gas can be used for the reduction of the base spreading resistance in AlGaN/GaN-based heterostructure bipolar transistors. (C) 2000 American Institute of Physics. [S0003-6951(00)00421-6].
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页码:3061 / 3063
页数:3
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