Atom structures on the Si(100) surface

被引:16
作者
Hashizume, T
Heike, S
Lutwyche, MI
Watanabe, S
Wada, Y
机构
[1] Advanced Research Laboratory, Hitachi Ltd., Hatoyama
关键词
gallium; scanning tunneling microscopy; semiconducting surfaces; silicon; surface chemical reaction;
D O I
10.1016/S0039-6028(97)00339-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have developed a method of fabricating metal-atom structures on a Si(100)-2 x 1-H surface by scanning tunnelling microscopy (STM). The atomic structures can be connected to bulk electrodes formed in situ of the STM. We first fabricated atomic-scale dangling-bond structures by STM manipulation of hydrogen atoms. Using the difference in adsorption energy of Ga atoms on the hydrogen terminated surface area with dangling-bond patterns, we have thermally deposited Ga atoms and fabricated atomic-scale Ga structures on the Si surface. (C) 1997 Elsevier Science B.V.
引用
收藏
页码:161 / 165
页数:5
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