Dynamic behaviour of a quartz extensional-mode non-tactile profile sensor

被引：5

作者：

Giousouf, M ^{[1
]}

Weinmann, M ^{[1
]}

Scheerer, W ^{[1
]}

Assmus, F ^{[1
]}

vonMunch, W ^{[1
]}

机构：

[1] UNIV STUTTGART,INST HALBLEITERTECH,D-70174 STUTTGART,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 61卷 / 1-3期

关键词：

quartz linear extensional-mode oscillators; hydrodynamic friction; damping effects; acoustic microscopy;

D O I：

10.1016/S0924-4247(97)80276-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This publication deals with the theoretical analysis of the dynamic behaviour of a quartz linear extensional-mode oscillator in relation to the type of surrounding gas and the gas pressure. The various damping components affecting the quartz are discussed. In the case of the so-called near-field effect, when the tip of the quartz is at a very short distance from a surface, effects that complicate the analytical treatment are found. The dynamic behaviour predicted by the analytic model is compared with experimental results.

引用

页码：287 / 292

页数：6