Comparative assessment of GST and GeTe Materials For Application to Embedded Phase-Change Memory Devices

被引:48
作者
Fantini, A. [1 ]
Perniola, L. [1 ]
Armand, M. [1 ]
Nodin, J. F. [1 ]
Sousa, V. [1 ]
Persico, A. [1 ]
Cluzel, J. [1 ]
Jahan, C. [1 ]
Maitrejean, S. [1 ]
Lhostis, S. [2 ]
Roule, A. [1 ]
Dressler, C. [1 ]
Reimbold, G. [1 ]
DeSalvo, B. [1 ]
Mazoyer, P. [2 ]
Bensahel, D. [2 ]
Boulanger, F. [1 ]
机构
[1] CEA LETI Minatec, F-38054 Grenoble, France
[2] ST Microelect, Crolles, France
来源
2009 IEEE INTERNATIONAL MEMORY WORKSHOP | 2009年
关键词
TECHNOLOGY;
D O I
10.1109/IMW.2009.5090585
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
This work presents a thorough comparative assessment Of undoped GST and GeTe active phase-change (PC) materials for application to embedded memory devices (in particular consumer and automotive products). The material screening and qualification is performed through optical reflectivity and 4-probes resistivity measurements. Electrical performances are then investigated through tests of lance-cell analytical PC memory cells. Reset current densities of GST and GeTe are comparable, while GeTe data-retention at high-temperature is significantly improved compared to GST suggesting that GeTe-based compounds are promising candidates for embedded PC memory applications.
引用
收藏
页码:66 / +
页数:2
相关论文
共 6 条
[1]  
HORII H, P VLSI 2003
[2]  
LAI S, IEDM 2008
[3]  
MATSUZAKI N, IEDM 2005
[4]  
MORIKAWA T, IEDM 2007
[5]   Phase-change memory technology with self-aligned μTrench cell architecture for 90 nm node and beyond [J].
Pirovano, A. ;
Pellizzer, F. ;
Tortorelli, I. ;
Rigano, A. ;
Harrigan, R. ;
Magistretti, M. ;
Petruzza, P. ;
Varesi, E. ;
Redaelli, A. ;
Erbetta, D. ;
Marangon, T. ;
Bedeschi, F. ;
Fackenthal, R. ;
Atwood, G. ;
Bez, R. .
SOLID-STATE ELECTRONICS, 2008, 52 (09) :1467-1472
[6]   Phase-change random access memory: A scalable technology [J].
Raoux, S. ;
Burr, G. W. ;
Breitwisch, M. J. ;
Rettner, C. T. ;
Chen, Y. -C. ;
Shelby, R. M. ;
Salinga, M. ;
Krebs, D. ;
Chen, S. -H. ;
Lung, H. -L. ;
Lam, C. H. .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 2008, 52 (4-5) :465-479