Study on local stability of field emitter arrays by using an emission microscope

被引：6

作者：

Nakane, H ^{[1
]}

Muto, Y ^{[1
]}

Yamane, K ^{[1
]}

Adachi, H ^{[1
]}

机构：

[1] Muroran Inst Technol, Dept Elect & Elect Engn, Muroran, Hokkaido 0508585, Japan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2000年 / 18卷 / 02期

关键词：

D O I：

10.1116/1.591317

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Electron emission from a field emitter array (FEA) was magnified by making use of an emission microscope, and the stability of the individual microtip was examined. The number of observable microtips increased with the total emission current of the whole FEA, and approached 90% of it. Some microtips showed unstable emission and the number of such unstable microtips increased with the total emission current. Gas molecules. which adsorbed locally to inside the microtip, would be caused by the instability of the electron emission. (C) 2000 American Vacuum Society. [S0734-211X(00)04502-9].

引用

页码：1003 / 1005

页数：3

共 5 条

[1]

Constancias C, 1997, IVMC'97 - 1997 10TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, P215

[2]

ITOH J, 1996, SURFACE PHYSIS, V17, P718

[3] ELECTRON OPTICAL PROPERTIES OF 3-ELECTRODE ELECTRON LENSES [J].

KANAYA, K ;

KAWAKATSU, H ;

YAMAZAKI, H ;

SIBATA, S .

JOURNAL OF SCIENTIFIC INSTRUMENTS, 1966, 43 (07) :416-+

[4] Emission microscope observation of FEAs [J].

Nakane, H ;

Yamane, K ;

Muto, Y ;

Kawata, S ;

Adachi, H .

APPLIED SURFACE SCIENCE, 1999, 146 (1-4) :169-171

[5]

SEPTIER A, 1954, ANN RADIOELECTR, V9, P374

← 1 →