Atmospheric-pressure hybrid plasma with combination of ac and microwave

被引:5
作者
Hong, Yong Cheol [1 ]
Uhm, Han Sup [1 ]
机构
[1] Ajou Univ, Dept Mol Sci & Technol, Suwon 443749, South Korea
关键词
D O I
10.1063/1.2403930
中图分类号
O59 [应用物理学];
学科分类号
摘要
A hybrid plasma system with combination of ac and microwave at atmospheric pressure was developed. The hybrid plasma is initiated by ac capillary plasma, is stabilized by a flowing channel of working gas through common electrodes, and is expanded by the dissipation of microwave energy, revealing two distinguishable plasma columns of about 1 m in length and a transition point. The capillary in the hybrid plasma system is working as a common electrode for the microwave and ac plasmas. Optical emission spectroscopy is used to characterize and monitor the argon and nitrogen excited species produced in different plasma columns. (c) 2006 American Institute of Physics.
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页数:3
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