Fabrication of ideally ordered nanohole arrays in anodic porous alumina based on nanoindentation using scanning probe microscope

被引：37

作者：

Masuda, H ^{[1
]}

Kanezawa, K ^{[1
]}

Nishio, K ^{[1
]}

机构：

[1] Tokyo Metropolitan Univ, Dept Appl Chem, Hachioji, Tokyo 1920397, Japan

来源：

CHEMISTRY LETTERS | 2002年 / 12期

关键词：

D O I：

10.1246/cl.2002.1218

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Ideally ordered hole array structures in anodic porous alumina were prepared by pretexturing Al using a nanoindentation apparatus equipped with a scanning probe microscope. The shallow concaves formed by the nanoindentation initiated hole development, and guided the growth of holes during the anodization. Hole arrays with hole intervals from 100 to 400 nm were fabricated by changing the intervals of concaves by nanoindentation with the scanning probe microscope.

引用

页码：1218 / 1219

页数：2

共 12 条

[1] Fabrication of ideally ordered anodic porous alumina with 63 nm hole periodicity using sulfuric acid
Asoh, H
Nishio, K
Nakao, M
Yokoo, A
Tamamura, T
Masuda, H
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (02): : 569 - 572
[2] Conditions for fabrication of ideally ordered anodic porous alumina using pretextured Al
Asoh, H
Nishio, K
Nakao, M
Tamamura, T
Masuda, H
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2001, 148 (04) : B152 - B156
[3] Ebihara K., 1983, J MET FINISH SOC JPN, V34, P548, DOI DOI 10.4139/SFJ1950.34.548
[4] Self-organized formation of hexagonal pore arrays in anodic alumina
Jessensky, O
Muller, F
Gosele, U
[J]. APPLIED PHYSICS LETTERS, 1998, 72 (10) : 1173 - 1175
[5] STRUCTURAL FEATURES OF OXIDE COATINGS ON ALUMINIUM
KELLER, F
HUNTER, MS
ROBINSON, DL
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1953, 100 (09) : 411 - 419
[6] IN-SITU IMAGING OF MU-N LOAD INDENTS INTO GAAS
LILLEODDEN, ET
BONIN, W
NELSON, J
WYROBEK, JT
GERBERICH, WW
[J]. JOURNAL OF MATERIALS RESEARCH, 1995, 10 (09) : 2162 - 2165
[7] Masuda H, 2001, ADV MATER, V13, P189, DOI 10.1002/1521-4095(200102)13:3<189::AID-ADMA189>3.0.CO
[8] 2-Z
[9] ORDERED METAL NANOHOLE ARRAYS MADE BY A 2-STEP REPLICATION OF HONEYCOMB STRUCTURES OF ANODIC ALUMINA
MASUDA, H
FUKUDA, K
[J]. SCIENCE, 1995, 268 (5216) : 1466 - 1468
[10] Highly ordered nanochannel-array architecture in anodic alumina
Masuda, H
Yamada, H
Satoh, M
Asoh, H
Nakao, M
Tamamura, T
[J]. APPLIED PHYSICS LETTERS, 1997, 71 (19) : 2770 - 2772

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