MEMS widely tunable lasers for WDM system applications

被引：4

作者：

Liu, AQ ^{[1
]}

Zhang, XM ^{[1
]}

Tang, DY ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

APOC 2002: ASIA-PACIFIC OPTICAL AND WIRELESS COMMUNICATIONS, OPTICAL SWITCHING AND OPTICAL INTERCONNECTION II | 2002年 / 4907卷

关键词：

Tunable laser; external-cavity tunable laser; blazed grating; DWDM; optical MEMS;

D O I：

10.1117/12.482270

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

Tunable lasers have wide applications in DWDM systems to save inventory cost and to improve the optical network functionalities. The Microelectromechanical Systems (MEMS) technology has shown strong promise to miniaturize the conventional mechanical tunable lasers with adding merits of high compactness, high speed, batch production and so on. In this paper, external cavity tunable diode lasers using MEMS movable mirrors and rotary gratings as the external reflectors are presented. One tunable laser of 2 mm x 1.5 mm is formed by integration of a surface-micromachined 3D mirror with a diode laser and an optical fiber. A wavelength tuning range of 16 nm is obtained. In addition, deep-etched structures such rotary gratings, circular mirror, microlens, and grooves for diode laser and fiber are illustrated to form widely tunable lasers.

引用

页码：186 / 194

页数：9

共 8 条

[1]

ANTHON D, 2002, P OFC2002 AN CAL US, P97

[2]

Bergmann J, 2001, Z SOZIOL, V30, P1

[3]

Hirano T., 1992, Journal of Microelectromechanical Systems, V1, P52, DOI 10.1109/84.128056

[4]

Hutley M. C., 1982, Diffraction Gratings

[5]

Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers [J].

Kiang, MH ;

Solgaard, O ;

Muller, RS ;

Lau, RY .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (01) :95-97

[6]

A novel integrated micromachined tunable laser using polysilicon 3-D mirror [J].

Liu, AQ ;

Zhang, XM ;

Murukeshan, VM ;

Lam, YL .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (05) :427-429

[7]

Demonstration of a tunable hybrid laser diode using an electrostatically tunable silicon micromachined Fabry-Perot interferometer device [J].

Sidorin, Y ;

Blomberg, M ;

Karioja, P .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1999, 11 (01) :18-20

[8]

Tunable laser diode using a nickel micromachined external mirror [J].

Uenishi, Y ;

Honma, K ;

Nagaoka, S .

ELECTRONICS LETTERS, 1996, 32 (13) :1207-1208

← 1 →