Evaluation of the crystal structure, film properties, and Bs of electroplated CoNiFe films

The factors which affect the saturation magnetic flux density (B-s) of electroplated CoNiFe films were investigated and the results are reported. The Fe composition, the ratio of body-centered cubic (110) to face-centered cubic (111) peak intensity (R-b), and the density were found to affect the B-s of the films. The B-s increased when the R-b, Fe composition, and the density were increased; we found that a larger grain size and fewer impurities produced a higher density film. It was determined that the suppression of the impurities and the increased grain size led to the high film density and high B-s. (C) 2002 The Electrochemical Society.