Silicon monolithic microchannel-cooled laser diode array

被引:49
作者
Skidmore, JA [1 ]
Freitas, BL [1 ]
Crawford, J [1 ]
Satariano, J [1 ]
Utterback, E [1 ]
DiMercurio, L [1 ]
Cutter, K [1 ]
Sutton, S [1 ]
机构
[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94551 USA
关键词
D O I
10.1063/1.126860
中图分类号
O59 [应用物理学];
学科分类号
摘要
A monolithic microchannel-cooled laser diode array is demonstrated that allows multiple diode-bar mounting with negligible thermal cross talk. The heat sink comprises two main components: a wet-etched Si layer that is anodically bonded to a machined glass block. The continuous wave (cw) thermal resistance of the 10 bar diode array is 0.032 degrees C/W, which matches the performance of discrete microchannel-cooled arrays. Up to 1.5 kW/cm(2) is achieved cw at an emission wavelength of similar to 808 nm. Collimation of a diode array using a monolithic lens frame produced a 7.5 mrad divergence angle by a single active alignment. This diode array offers high average power/brightness in a simple, rugged, scalable architecture that is suitable for large two-dimensional areas. (C) 2000 American Institute of Physics. [S0003-6951(00)00827-5].
引用
收藏
页码:10 / 12
页数:3
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