Infrared spectra of carbon nitride films

被引:84
作者
Rodil, SE
Ferrari, AC
Robertson, J
Muhl, S
机构
[1] Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
[2] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
关键词
infrared spectroscopy; carbon; nitrides; Raman scattering; optical properties; electron energy loss spectroscopy (EELS);
D O I
10.1016/S0040-6090(02)00791-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The assignment of the vibrational modes in amorphous carbon nitride (CN) films is discussed by considering CN films deposited using a variety of methods. The infrared (IR) spectra of CN show three main absorption bands. In hydrogenated CN samples, CHx and NHx groups give rise to stretching vibrations at 3000 and 3400 cm(-1), respectively. A weaker sharp band is observed approximately 2200 cm(-1) due to CN-sp(1) bonds. Finally, there is a broad band between 1000 and 2000 cm(-1). It is usually stated that the effect of nitrogen into carbon films is to break the symmetry of the sp(2) carbon bonds making the Raman 'G' (graphitic) and 'D' (disorder) modes IR active, so the broad band between 1000 and 2000 cm(-1) is similar in both IR and Raman spectra. However, it is shown that nitrogen is not necessary to have significant IR activity in the 1000-2000 cm(-1) region. Also, Raman spectroscopy in carbon is always a resonant process, so that the spectra depend on the excitation energy. Therefore, the similarity of the visible Raman and IR spectra of some CNs is generally a coincidence. We show that the IR broad band in the 1000-2000 cm(-1) region is an electronic effect and is not due to activation of IR forbidden modes due to symmetry breaking. This explains the IR spectra not only of CN films but also of N-free amorphous carbon films and is related to the presence of the system of delocalized pi bonds with increasing conjugation. (C) 2002 Elsevier Science B.V All rights reserved.
引用
收藏
页码:122 / 131
页数:10
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