Ferrite-based integrated planar inductors and transformers fabricated at low temperature

被引：50

作者：

Park, JY

Lagorce, LK

Allen, MG

机构：

[1] Sch. of Elec. and Comp. Engineering, Georgia Institute of Technology, Atlanta

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1997年 / 33卷 / 05期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/20.617931

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Fully integrated microinductors and microtransformers based on two different geometries and ferrite composite materials are designed, fabricated, tested, and compared. These devices are based on screen printed polymer/ferrite composites and electroplated copper coils, and are deposited at low temperature, making them compatible with organic electronic packaging substrates.

引用

页码：3322 / 3324

页数：3

共 4 条

[1] Balakrishnan A., 1993, P 8 ANN APPL POW EL, P912
[2] Micromachined polymer magnets
Lagorce, LK
Allen, MG
[J]. NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 85 - 90
[3] PARK J, 1997, IN PRESS P IEEE APEC
[4] PERMEABILITY EVALUATION OF FERRITE PASTES, EPOXIES, AND SUBSTRATES OVER A WIDE-RANGE OF FREQUENCIES
RIAHIKASHANI, MM
ELSHABINIRIAD, A
[J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1992, 41 (06) : 1036 - 1040

← 1 →