Controlled fabrication of aligned carbon nanotube patterns

被引：19

作者：

Huang, SM ^{[1
]}

Dai, LM ^{[1
]}

Mau, A ^{[1
]}

机构：

[1] CSIRO, Clayton S MDC, Vic 3169, Australia

来源：

PHYSICA B-CONDENSED MATTER | 2002年 / 323卷 / 1-4期

关键词：

aligned carbon nanotubes; micropatterning; controlled fabrication;

D O I：

10.1016/S0921-4526(02)01043-8

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We have developed techniques to fabricate aligned CNTs patterns in large area by photolithographic and soft-lithographic technologies by either pre-patterning catalysts or polymers for substrate-site selective growth of CNTs based on chemical vapor deposition. The resolution of the formed aligned CNTs, patterns by photo- and soft-lithography can be down to micrometer scale and different structural features of the aligned CNTs patterns such as multi-dimensional patterns can be achieved by controlling the experimental conditions. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：333 / 335

页数：3

共 12 条

[1] Combinatorial optimization of heterogeneous catalysts used in the growth of carbon nanotubes [J].