Series production of large area YBa2CU3O7 films for microwave and electrical power applications

被引:4
作者
Prusseit, W [1 ]
Furtner, S [1 ]
Nemetschek, R [1 ]
机构
[1] THEVA Dunnschichttechn GmbH, D-85386 Eching Dietersheim, Germany
关键词
D O I
10.1088/0953-2048/13/5/318
中图分类号
O59 [应用物理学];
学科分类号
摘要
The series production of YBCO films on a daily basis is making high demands on the reliability and reproducibility of the deposition technique on the one hand, but also flexibility in the film material and substrate choice on the other hand. Beyond that, a strict quality management and customer support are absolute necessities to serve a market which is approaching real technical applications and where engineers are mainly concerned with device layout and performance instead of material issues. These often overlooked points are even more time consuming and challenging than the deposition process itself.
引用
收藏
页码:519 / 521
页数:3
相关论文
共 3 条
[1]   HOMOGENEOUS HIGH-QUALITY YBA(2)CU(3)O7 FILMS ON 3'' AND 4'' SUBSTRATES [J].
BERBERICH, P ;
UTZ, B ;
PRUSSEIT, W ;
KINDER, H .
PHYSICA C, 1994, 219 (3-4) :497-504
[2]  
KINDER H, 1997, P INT WORKSH SUP HAW, P141
[3]   Continuous YBa2Cu3O7-delta film deposition by optically controlled reactive thermal co-evaporation [J].
Utz, B ;
RiederZecha, S ;
Kinder, H .
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1997, 7 (02) :1181-1184