Thindielectric films - Uncorrelated breakdown of integrated circuits

被引：59

作者：

Alam, MA ^{[1
]}

Smith, RK ^{[1
]}

Weir, BE ^{[1
]}

Silverman, PJ ^{[1
]}

机构：

[1] Agere Syst, Murray Hill, NJ 07076 USA

来源：

NATURE | 2002年 / 420卷 / 6914期

关键词：

D O I：

10.1038/420378a

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

[No abstract available]

引用

页码：378 / 378

页数：1

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